The Leica DM8000 M and Leica DM12000 M optical inspection systems provide an innovative yet cost-effective system solution for mastering present and future inspection challenges with confidence. Inspection, process control and defect analysis of wafers or LCDs and TFTs has to be fast, To detect macro defects, the Leica DM8000 M and DM12000 M have a micro/macro mode for rapid scanning of large components. The macro magnification captures an object field of approximately 40 mm.
Leica DM8000M & DM12000 M RL High Throughput Inspection & Review System
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Description
The Leica DM8000 M and Leica DM12000 M optical inspection systems provide an innovative yet cost-effective system solution for mastering present and future inspection challenges with confidence. Inspection, process control and defect analysis of wafers or LCDs and TFTs has to be fast, To detect macro defects, the Leica DM8000 M and DM12000 M have a micro/macro mode for rapid scanning of large components. The macro magnification captures an object field of approximately 40 mm.
– Optical system: Leica HC optics (optical system corrected to infinity)
– Macro imaging: Super widefield overview image with up to 40 mm scan field on the sample
– Objective nosepiece Motorized, brightfield/darkfield objectives (M32), 6-position
– Microscope stages: For DM8000 M Manual inspection stage 8 x 8”; 202 x 202 mm travel range | For DM12000 M Manual inspection stage 12 x 12” ; 302 x 302 mm travel range
– Control units: Leica SmartMove, x,y,z control with 4 freely programmable function keys
– Focus: Heavy-duty manual 2-stage focus, coarse and fine mode; 35 mm travel range; height-adjustable focus knobs
– Ambient conditions For use in industrial environments with EMC (Class A threshold).
High Throughput 8″ Inspection & Review System Leica DM8000 M
New optical features offered by the Leica DM8000 M such as the optional macro mode or the oblique UV illumination (OUV, with i-line UV option) not only improve resolving power but also speed up throughput when inspecting samples with 8’’/200 mm diameter.
The illumination is based on the latest LED technology and is fully integrated into the microscope. The low heat radiation and integration into the stand ensures that there is an optimal airflow around the microscope. The long lifetime yet extremely low power consumption of the LEDs offer enormous savings potential.
With a single touch of a button you can change the magnification, the illumination or contrast mode.
See four times more
The macro magnification gives you four times the field of view of conventional scanning objectives.
Top resolution
The new Oblique UV mode (OUV) combines oblique illumination with UV light, enabling you to view your sample in top resolution from any angle.
Ergonomic design
Optimized for long spells at the microscope, intuitively operated and easy to adapt to different user levels.
LED illumination
The integrated LED illumination optimizes the airflow. Thanks to their long lifetimes and low power consumption, the LEDs also have enormous savings potential.
Precision 12″ Inspection & Review System Leica DM12000 M
Optical features offered by the Leica DM12000 M such as the optional macro mode or the oblique UV illumination (OUV, with i-line UV option) not only improve resolving power but also speed up throughput when inspecting samples with 12’’/300 mm diameter.
The illumination is based on the latest LED technology and is fully integrated into the microscope. The low heat radiation and integration into the stand ensures that there is an optimal airflow around the microscope. The long lifetime yet extremely low power consumption of the LEDs offer enormous savings potential.
With a single touch of a button you can change the magnification, the illumination or contrast mode.
See four times more
The macro magnification gives you four times the field of view of conventional scanning objectives.
Top resolution
The new Oblique UV mode (OUV) combines oblique illumination with UV light, enabling you to view your sample in top resolution from any angle.
Ergonomic design
Optimized for long spells at the microscope, intuitively operated and easy to adapt to different user levels.
LED illumination
The integrated LED illumination optimizes the airflow. Thanks to their long lifetimes and low power consumption, the LEDs also have enormous savings potential.
